National Institute of Standards and Technology, Boulder Laboratories (NIST Boulder)
Chemical-mechanical polishing machine
equipmentfabrication / machiningIndustry: Aerospace
- Category
- Physical Infrastructure
- Affiliations
- NIST Boulder
Description
CMP machine in the Boulder Microfabrication Facility that planarizes silicon dioxide layers, enabling more complex multilayer circuitry and polishing of optical films roughened during processing.
Official page
Open official page (opens in a new tab)This points to a facility page, not a dedicated item page.
Contact
- Contact
- John Nibarger <john.nibarger@nist.gov> (303) 497-4575; Jim Hodge <james.hodge@nist.gov> (720) 879-2853
Details
- Keywords
- silicon dioxide planarization, multilayer circuitry, optical film smoothing, microfabrication facility cleanroom
- Location
- Boulder, Colorado
- Equipment class
- Planarization tool (CMP)
- Associated entity
- Boulder Microfabrication Facility (NIST PML)