National Institute of Standards and Technology, Boulder Laboratories (NIST Boulder)
Heidelberg MLA-150
equipmentfabrication / machiningIndustry: Aerospace
- Category
- Physical Infrastructure
- Affiliations
- NIST Boulder
Description
Maskless optical lithography tool in the Boulder Microfabrication Facility that writes patterns directly onto substrates (1 cm chips to 150 mm wafers) with a 375 nm or 405 nm laser at 0.9 µm resolution, shortening prototyping by eliminating reticles or masks.
Official page
Open official page (opens in a new tab)This points to a facility page, not a dedicated item page.
Contact
- Contact
- John Nibarger <john.nibarger@nist.gov> (303) 497-4575; Jim Hodge <james.hodge@nist.gov> (720) 879-2853
Details
- Keywords
- direct-write optical lithography, rapid prototyping, design prototyping, microfabrication facility cleanroom
- Location
- Boulder, Colorado
- Key spec
- 375 nm or 405 nm laser; 1 cm chips to 150 mm wafers; 0.9 µm resolution
- Equipment class
- Maskless aligner (laser direct-write lithography)
- Associated entity
- Boulder Microfabrication Facility (NIST PML)
- Specifications
- 5 value+unit tokens in bullet text