National Institute of Standards and Technology, Boulder Laboratories (NIST Boulder)
JEOL JBX-6300FS e-beam lithography tool
equipmentfabrication / machiningIndustry: Aerospace
- Category
- Physical Infrastructure
- Affiliations
- NIST Boulder
Description
Electron-beam lithography tool in the Boulder Microfabrication Facility allowing wafer-level lithography of features as small as 8 nm, with 1000x better position registration and write speed than the previous tool; supports quantum information devices, single-photon detectors and superconducting devices.
Official page
Open official page (opens in a new tab)This points to a facility page, not a dedicated item page.
Contact
- Contact
- John Nibarger <john.nibarger@nist.gov> (303) 497-4575; Jim Hodge <james.hodge@nist.gov> (720) 879-2853
Details
- Keywords
- wafer-level lithography, position registration, quantum information devices, superconducting devices, microfabrication facility cleanroom
- Location
- Boulder, Colorado
- Key spec
- Features as small as 8 nm
- Equipment class
- Electron-beam lithography
- Associated entity
- Boulder Microfabrication Facility (NIST PML)
- Specifications
- 7 value+unit tokens in bullet text