National Institute of Standards and Technology, Boulder Laboratories (NIST Boulder)
Dual Beam Focused Ion Beam / Scanning Electron Microscope (FIB/SEM)
equipmentanalytical / metrologyIndustry: Aerospace
- Category
- Physical Infrastructure
- Affiliations
- NIST Boulder
Description
Zeiss Auriga dual-beam instrument combining Ga focused-ion-beam milling/deposition (~10 nm patterning) with field-emission SEM imaging and EDS; used for atom-probe and TEM sample preparation, nanofabrication of probe tips and Josephson-junction cross-sections.
Official page
Open official page (opens in a new tab)Contact
- Contact
- Ann Chiaramonti Debay <chiaramonti@nist.gov> (303) 497-5701; Norman A. Sanford <norman.sanford@nist.gov> (303) 497-5239
Details
- Keywords
- sample preparation, nanofabrication, gas precursors, josephson junction cross-section, tem lamella
- Location
- Boulder, Colorado
- Location
- Boulder
- Key spec
- Ion column 3 nm, FESEM 1 nm at 15 kV; ~10 nm patterning
- Equipment class
- Dual-beam FIB/SEM
- Associated entity
- NIST Headquarters ; Laboratory Programs ; Physical Measurement Laboratory ; Applied Physics Division ; Quantitative Nanostructure Characterization Group