Joint Institute for Laboratory Astrophysics (JILA)
RIE
equipmentfabrication / machiningIndustry: Aerospace
- Category
- Physical Infrastructure
- Affiliations
- JILA
Description
RIE in the JILA Keck Lab, recommended with oxygen for removing organics from sample and wafer surfaces; the pump is started manually from the pump controller.
Official page
https://jila-kecklab.colorado.edu/index.html
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Access
- Access summary
- book
How to use this asset isn’t listed yet. Open the official page.
Contact
- Contact
- (no name)
Details
- Keywords
- oxygen, organics removal, wafer surfaces, pump controller
- Location
- Boulder, Colorado
- Equipment class
- RIE etch system
- Associated entity
- JILA Keck Lab | Home